The PHI 710 Scanning Auger NanoProbe System provides the analyst with definitive identification and distribution of surface chemical species on solid materials by Auger Electron Spectroscopy (AES). The unique design of the “710” enables comprehensive compositional characterization and secondary electron imaging of sub-micrometer surface features, thin film structures, and surface contaminants.

The 710 has the ability to use the high energy resolution spectroscopy mode to identify
chemical states from Auger spectra, images ,and depth profiles.

At the core of the 710’s analytical capability is a 25 kV Schottky thermal field emission electron source that is coaxially located in a full cylindrical mirror energy analyzer (CMA). The unique geometry of the electron source within the CMA analyzer
allows the Auger imaging of features on the sample without shadowing induced by sample surface roughness and structures with high topography. The shadowing in Auger imaging is frequently observed with other Auger systems using an alternative spherical capacitor analyzer (SCA).

Accompanying this core technology are new ultra-low noise system control electronics, a scintillator secondary electron detector, a high performance low voltage floating column Argon sputter ion gun, a precision motorized five axis sample stage,
and PHI’s innovative instrument control and data reduction software packages: SmartSoft-AES™ and MultiPak™.

To meet the demanding needs of today’s nanomaterials applications the 710 provides the highest stability AES imaging platform available. An acoustic enclosure, new ultra-low noise electronics, a stable sample stage, and reliable image registration software enable AES imaging and spectroscopy of nanoscale features. For harsh environments vibration isolators are also available.

True ultrahigh vacuum (UHV) allows unambiguous, accurate surface characterization by preventing sample contamination during analysis. The test chamber is pumped by a differential ion pump combined with a Titanium Sublimation Pump (TSP). The Schottky field emission source is independently pumped to ensure long emitter life. The latest magnetic levitation turbo molecular pump technology is used for system rough pumping, sample introduction chamber pumping, and differential sputter ion gun pumping.

The 710 is controlled by PHI’s SmartSoft-AES instrument control software that is located on a dedicated PC with Windows® 7. All PHI electron spectroscopy products include the de facto industry standard PHI MultiPak data reduction software for extraction of maximum information from the data. The 710 is internet ready and can be operated remotely using standard communication protocols.

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Основные характеристики
Разрешение во вторичных электронах
3 нм
Разрешение в режиме Оже-картирования
8 нм
Тип анализатора
цилиндрическое зеркало